Growing attention have been paid globally on the production and emission of ODS and fluorinated greenhouse gases such as CFCs, HCFCs, Halons, HFCs, PFCs, CCl4, CH3Br, CH3Cl3, SF6, NF3 due to ozone depletion and climate change. These gases are controlled by the Montreal Protocol and the Kyoto Protocol. With the rapid growth of China's economy, the global proportion of the production and consumption of halogenated hydrocarbons controlled by the two conventions has increased rapidly from less than 1% in 1985 to more than 50% in 2015. The emission reduction of China have become the focus of global attention. The concentration of ODS and F-gases in the ambient air is at the ppt level, which is 6 orders of magnitude lower than that of other air pollutants such as VOC. In addition, the variation range of atmospheric concentration is very small, which requires very high detection limit and accuracy of the monitoring system. The monitoring systems and methods for VOC can not meet the monitoring requirements of controlled halogenated hydrocarbons under ambient atmospheric concentration. In order to solve the problem of controlled halogenated hydrocarbon monitoring, the Ministry of Science and Technology of China launched the national key R&D plan “the effectiveness evaluation, prediction and early warning of controlled halogenated hydrocarbon emission reduction” at the end of 2019. Beijing Huanaco Innovation Technology Co., Ltd., as a participant, is responsible for the development and industrialization of high-precision monitoring technology of controlled halogenated hydrocarbons. TIANJI ODS5-PRO is one of the achievements of the project. It can monitor about 50 halogenated hydrocarbons in the ambient air (including species that are difficult to be detected by conventional methods such as NF3 and CF4). The number of monitoring species, detection limit and accuracy of the system are comparable with Medusa system of AGAGE network.